He aha ke ʻano o ka hoʻoheheʻe ʻana?
He ʻenehana holomua ka hoʻopili ʻana i ka vacuum e waiho ana i nā kiʻiʻoniʻoni lahilahi ma luna o ka ʻili o nā substrate ma o nā ʻano kino a i ʻole nā kemika i loko o kahi kaiapuni. Aia kona waiwai nui i ka maʻemaʻe kiʻekiʻe, ka pololei kiʻekiʻe a me ka palekana o ke kaiapuni, a hoʻohana nui ʻia i nā optics, electronics, tools, new energy and other fields.
Pono e hoʻolako ʻia ka ʻōnaehana hoʻoheheʻe ʻana me nā kānana inlet?
ʻO ka mea mua, e aʻo kākou i nā mea hoʻohaumia maʻamau i ka uhi ʻia ʻana. No ka laʻana, nā ʻāpana, ka lepo, ka ʻaila hinu, ka wai wai, a me nā mea ʻē aʻe. ʻO kēia mau mea haumia e komo ana i ke keʻena uhi e hoʻemi i ka helu deposition, ʻaʻole kūlike ka papa kiʻiʻoniʻoni, a me ka hōʻino ʻana i nā mea hana.
ʻO ke kūlana kahi e pono ai ka uhi ʻana o ka vacuum i nā kānana inlet
- I ka wā o ka uhi ʻana, ua paʻi ka mea i hoʻopaʻa ʻia i nā ʻāpana.
- He kiʻekiʻe ke koi maʻemaʻe o ka papa kiʻiʻoniʻoni, ʻoi aku ka nui ma nā ʻano optics a me nā semiconductors.
- Loaʻa nā kinoea ʻino (maʻalahi i hana ʻia ma ka reactive sputtering). I kēia hihia, ua hoʻokomo nui ʻia ka kānana no ka pale ʻana i ka ʻumeke.
ʻO ke kūlana kahi ʻaʻole pono ka uhi ʻana i ka ʻūhā i nā kānana inlet
- Hoʻohana ka nui o nā mea hoʻolako i ka ʻaila ʻaila i kahi ʻōnaehana hoʻoheheʻe kiʻekiʻe ʻole o ka aila (e like me ka molecular pump + ion pump), a maʻemaʻe ke kaiapuni hana. No laila, ʻaʻohe pono no nā kānana inlet, a i ʻole nā kānana exhaust.
- Aia kekahi kūlana ʻaʻole i koi ʻia nā kānana inlet, ʻo ia hoʻi, ʻaʻole kiʻekiʻe ka pono o ka maʻemaʻe o ka papa kiʻiʻoniʻoni, e like me kekahi mea hoʻonaninani.
ʻO nā mea ʻē aʻe e pili ana i ka ʻaila diffusion pump
- Inā hoʻohana ʻia ka pauma ʻaila a i ʻole ka ʻaila diffusion pump,kānana hoʻopaupono e hoʻokomo.
- ʻAʻole kūpaʻa ka mea kānana polymer i ka wela kiʻekiʻe o ka paila diffusion
- I ka hoʻohana ʻana i ka ʻaila diffusion pump, hiki ke kahe ka ʻaila pauma a hoʻohaumia i ke keʻena uhi. No laila, pono ia i kahi pahele anu a i ʻole ka ʻaila baffle e pale ai i ka pōʻino.
I ka hopena, inā pono ka ʻōnaehana hoʻoheheʻe ʻianā kānana komopili i nā koi kaʻina hana, ka hoʻolālā ʻana o ka ʻōnaehana a me ka pilikia o ka hoʻohaumia ʻana.
Ka manawa kau: Apr-19-2025
