LVGE VACUUM PUMP FILTER

"Hoʻoholo ʻo LVGE i kāu mau pilikia kānana"

ʻO ka OEM/ODM o nā kānana
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Electron Beam Evaporation and the Vacuum Pump

I loko o ka honua paʻakikī o ka hoʻoheheʻe ʻana i nā kiʻiʻoniʻoni lahilahi, ʻike ʻia ka evaporation electron beam (e-beam) no kona hiki ke hana i nā uhi hoʻomaʻemaʻe kiʻekiʻe. ʻO kahi nīnau koʻikoʻi e pili ana i kēia ʻenehana inā he pono ia i kahi ʻōpala. ʻO ka pane he ʻae maopopo. ʻAʻole he mea hoʻohui wale nō ka ʻōnaehana hoʻokō kiʻekiʻe akā he mea pono loa no ke kaʻina hana e hana pono a maikaʻi.

ʻO ke kumu o ka e-beam evaporation e pili ana i ka nānā ʻana i kahi kukuna electron kiʻekiʻe ma luna o kahi mea kumu (e like me ke gula, silicon oxide, a i ʻole alumini) i loko o kahi kīʻaha wai-cooled. Hoʻoheheʻe ʻia ka mea hoʻoheheʻe a hoʻoheheʻe ʻia ka hoʻomehana kūloko. A laila hele kēia mau ʻātoma i hoʻohu ʻia ma kahi ala ʻike ʻike a hoʻopaʻa ʻia ma kahi substrate, e hana ana i kahi kiʻiʻoniʻoni lahilahi. ʻO kēia kaʻina holoʻokoʻa e hilinaʻi koʻikoʻi i kahi kaiapuni kiʻekiʻe-vacuum, maʻamau i loko o ka laulā o 10⁻³ Pa a hiki i 10⁻⁶ Pa.

Hoʻoheheʻe Electron Beam

ʻO ka mea e pono ai no kēlā ʻano ʻūhā nui loa he ʻekolu. ʻO ka mea mua, e hōʻoiaʻiʻo i ka huakaʻi hele ʻole o ka kukuna electron. I mua o ka nui o nā molekele kinoea, e hoʻopuehu a hui ʻia nā electrons, e nalowale ana ko lākou ikaika a ʻaʻole e hāʻawi i ka wela nui i ka pahu hopu. Hoʻopau ka lāʻau i ka nānā ʻana, no laila ʻaʻole pono ke kaʻina hana.

ʻO ka lua, a ʻo ka mea koʻikoʻi loa, ʻo ke kaiapuni vacuum e hōʻoiaʻiʻo i ka maʻemaʻe a me ka maikaʻi o ke kiʻiʻoniʻoni i waiho ʻia. Inā ʻaʻole ia, e hoʻohaumia ke koena kinoea e like me ka oxygen a me ka mahu wai i ka uhi ʻana i ʻelua mau ala ʻino: e hana kemika lākou me ka mea i hoʻoheheʻe ʻia e hana i nā oxide makemake ʻole, a lilo lākou i loko o ke kiʻiʻoniʻoni e ulu nei i mea haumia. ʻO kēia ka hopena i kahi kiʻiʻoniʻoni porous, liʻiliʻi ka hoʻopili ʻana, a loaʻa iā ia nā ʻano mechanical a me ka optical haʻahaʻa. Hoʻokumu ka ʻūhā kiʻekiʻe i kahi ala maʻemaʻe, "ballistic" no nā ʻātoma i hoʻoheheʻe ʻia, e ʻae iā lākou e hoʻoheheʻe i loko o kahi papa paʻa, ʻaʻahu, a me ka paʻa kiʻekiʻe.

ʻO ka hope, pale ka ʻūhā i ke filament o ka pū electron. ʻO ka thermionic cathode e hoʻokuʻu ana i nā electrons e hana i nā wela kiʻekiʻe loa a hiki ke hoʻoheheʻe ʻia a puhi ʻia kokoke koke inā ʻike ʻia i ka ea.

No laila, ʻo kahi ʻōnaehana hoʻoheheʻe maʻemaʻe - ka hui pū ʻana i nā pamu roughing a me nā ʻōpala kiʻekiʻe e like me ka turbomolecular a i ʻole ka diffusion pumps - he mea nui ia. I ka hopena, ʻaʻole hiki i ka ʻumeke wai ke hoʻoheheʻe wale i ka electron beam evaporation; wehewehe ia ia, e hana ana i kahi paʻa hiki ʻole ke hoʻopaʻa ʻia e pono ai no ka hana ʻana i nā pale hana kiʻekiʻe i koi ʻia e nā ʻoihana mai nā semiconductors a i nā optics. Aia no kekahinā kānanano ka pale ʻana i nā ʻumeke wai, inā ʻaʻohe,kāhea iā mā˚ou.


Ka manawa hoʻouna: Nov-12-2025