Nyob rau hauv lub ntiaj teb sophisticated ntawm nyias zaj duab xis deposition, electron beam (e-beam) evaporation stands rau nws muaj peev xwm los tsim high-purity, ntom txheej. Ib lo lus nug tseem ceeb nyob ib puag ncig cov thev naus laus zis no yog seb nws puas xav tau lub tshuab nqus tsev vacuum. Lo lus teb yog unequivocal yog. Lub tshuab nqus tsev ua haujlwm siab tsis yog ib qho khoom siv xwb tab sis yog qhov yuav tsum tau ua ua ntej rau cov txheej txheem kom ua haujlwm tau zoo thiab ua tau zoo.
Lub hauv paus ntawm e-nqaj evaporation yuav tsom mus rau lub zog hluav taws xob hluav taws xob mus rau ib qho khoom siv (xws li kub, silicon oxide, lossis txhuas) uas muaj nyob rau hauv dej txias crucible. Cov cua sov hauv zos ua rau cov khoom yaj thiab vaporize. Cov vaporized atoms tom qab ntawd taug kev hauv txoj kab ntawm txoj kev pom thiab condense ntawm lub substrate, tsim ib zaj duab xis nyias. Tag nrho cov kab ke no tseem ceeb heev nyob ntawm qhov chaw nqus tsev siab, feem ntau nyob hauv thaj tsam ntawm 10⁻³ Pa rau 10⁻⁶ Pa.
Qhov tsim nyog rau lub tshuab nqus tsev zoo li no yog peb npaug. Ua ntej, nws ua kom tsis muaj kev cuam tshuam kev mus los ntawm cov kab hluav taws xob hluav taws xob. Nyob rau hauv lub xub ntiag ntawm cov roj molecules ntau dhau lawm, cov electrons yuav tawg thiab sib tsoo, poob lawv lub zog thiab tsis xa cov cua kub rau lub hom phiaj. Lub beam yuav defocus, rendering txheej txheem ineffective.
Qhov thib ob, thiab qhov tseem ceeb tshaj plaws, lub tshuab nqus tsev ib puag ncig lav qhov purity thiab zoo ntawm cov yeeb yaj kiab tso. Yog tsis muaj nws, cov roj seem zoo li oxygen thiab dej vapor yuav paug cov txheej hauv ob txoj kev puas tsuaj: lawv yuav tshuaj lom neeg nrog cov khoom siv vaporized los tsim cov oxides uas tsis xav tau, thiab lawv yuav koom nrog rau hauv zaj duab xis loj hlob raws li impurities. Qhov no ua rau cov yeeb yaj kiab uas ntxeem tau, tsis muaj nplaum, thiab muaj cov khoom siv kho qhov muag tsis zoo thiab kho qhov muag. Lub tshuab nqus tsev siab tsim ib txoj hauv kev huv, "ballistic" rau cov vaporized atoms, tso cai rau lawv los ua ib txheej tuab, zoo ib yam, thiab siab ncaj.
Thaum kawg, lub tshuab nqus tsev tiv thaiv cov phom electron filament. Lub thermionic cathode uas emits electrons ua haujlwm ntawm qhov kub siab heev thiab yuav oxidize thiab hlawv tawm yuav luag tam sim ntawd yog tias raug huab cua.
Yog li ntawd, lub tshuab nqus tsev twj-sib txuas cov twj roughing thiab lub tshuab nqus tsev siab zoo li turbomolecular lossis diffusion twj-yog qhov tseem ceeb. Hauv kev xaus, lub tshuab nqus tsev twj tso kua mis tsis yog tsuas yog ua kom muaj hluav taws xob hluav taws xob evaporation; nws txhais tau tias, tsim ib daim ntawv cog lus tsis sib haum xeeb uas yog qhov tseem ceeb rau kev tsim cov txheej txheem siab uas xav tau los ntawm kev lag luam los ntawm semiconductors mus rau optics. Kuj yuav tsum muajlimtiv thaiv lub tshuab nqus tsev twj, yog tias tsis muaj,tiv tauj peb.
Lub sij hawm xa tuaj: Nov-12-2025
