M'dziko lotsogola la kuyika kwa mafilimu opyapyala, mpweya wa ma elekitironi (e-beam) umadziwika chifukwa cha kuthekera kwake kupanga zokutira zoyera kwambiri, zowuma. Funso lofunika kwambiri lozungulira ukadaulo uwu ndilakuti likufuna pampu ya vacuum. Yankho lake n’lakuti inde mosakayikira. Dongosolo la vacuum yogwira ntchito kwambiri sikuti ndi chowonjezera chabe koma chofunikira mtheradi kuti ntchitoyi igwire bwino ntchito.
Pakatikati pa evaporation ya e-beam imaphatikizapo kuyang'ana mtengo wa elekitironi yamphamvu kwambiri pa gwero (monga golide, silicon oxide, kapena aluminiyamu) yomwe ili mu crucible yoziziritsidwa ndi madzi. Kutentha kwakukulu kwa m'deralo kumapangitsa kuti zinthuzo zisungunuke ndi kusungunuka. Kenako maatomu opangidwa nthunzi amenewa amayenda m’njira yodutsa m’njira yooneka ndi maso ndipo amaunjikana pagawo laling’ono, n’kupanga filimu yopyapyala. Kutsatira konseku kumadalira kwambiri malo okhala ndi vacuum, nthawi zambiri mkati mwa 10⁻³ Pa mpaka 10⁻⁶ Pa.
Kufunika kwa vacuum yochuluka ngati imeneyi ndi katatu. Choyamba, zimatsimikizira kuyenda kosasunthika kwa mtengo wa electron. Pakakhala mamolekyu agasi ochuluka, ma elekitironiwo amamwazikana ndi kugundana, kutaya mphamvu zawo ndi kulephera kupereka kutentha kwakukulu kwa chandamalecho. Mtengowo ukhoza kutsika, zomwe zimapangitsa kuti ntchitoyi ikhale yosagwira ntchito.
Chachiwiri, komanso chofunikira kwambiri, malo opanda mpweya amatsimikizira chiyero ndi mtundu wa filimu yoyikidwa. Popanda izo, mpweya wotsalira monga mpweya ndi nthunzi wamadzi ukhoza kuipitsa zokutirazo m'njira ziwiri zowononga: amatha kuchitapo kanthu ndi zinthu za vaporized kupanga ma oxide osafunikira, ndipo amaphatikizidwa mufilimu yomwe ikukula ngati zonyansa. Izi zimabweretsa filimu yomwe imakhala ndi porous, yosamatira pang'ono, ndipo imakhala ndi makina otsika komanso owoneka bwino. Vacuum yapamwamba imapanga njira yoyera, ya "ballistic" ya ma atomu a vaporized, kuwalola kuti asunthike kukhala wandiweyani, yunifolomu, komanso wosanjikiza kwambiri.
Pomaliza, vacuum imateteza ulusi wamfuti ya electron. Thermionic cathode yomwe imatulutsa ma elekitironi imagwira ntchito pa kutentha kwambiri ndipo imatha kutulutsa okosijeni ndikuwotcha nthawi yomweyo ngati itawululidwa ndi mpweya.
Chifukwa chake, makina opopera otsogola - kuphatikiza mapampu ovutirapo ndi mapampu a vacuum apamwamba ngati mapampu a turbomolecular kapena mapampu ophatikizira - ndiofunikira. Pomaliza, vacuum mpope sikuti amalola elekitironi mtengo evaporation; imatanthauzira, kupanga mgwirizano wosasweka womwe ndi wofunikira kuti apange zokutira zapamwamba zomwe zimafunidwa ndi mafakitale kuchokera ku semiconductors kupita ku optics. Payeneranso kukhalazoseferakuteteza mapampu vacuum, ngati palibe,Lumikizanani nafe.
Nthawi yotumiza: Nov-12-2025
