Mwisi yisi igoye yo kubika firime yoroheje, umwuka wa elegitoronike (e-beam) ugaragara cyane mubushobozi bwayo bwo gukora isuku ryinshi, yuzuye. Ikibazo cyibanze kijyanye n'ikoranabuhanga ni ukumenya niba bisaba pompe vacuum. Igisubizo ni yego. Sisitemu yo gukora cyane cyane ntabwo ari ibikoresho gusa ahubwo nibisabwa byuzuye kugirango inzira ikore neza kandi neza.
Intandaro yo guhumeka e-beam ikubiyemo kwibanda ku mbaraga za elegitoronike zifite ingufu nyinshi ku bikoresho (nka zahabu, okiside ya silikoni, cyangwa aluminium) bikubiye mu mazi akonje. Ubushyuhe bukabije bwaho butera ibikoresho gushonga no guhumeka. Izi atome ziva mu kirere noneho zigenda mu murongo-wo-kureba-inzira hanyuma zigahurira kuri substrate, zigakora firime yoroheje. Uru ruhererekane rwose rushingiye cyane kubidukikije biri hejuru cyane, mubisanzwe biri hagati ya 10⁻³ Pa kugeza 10⁻⁶ Pa.
Gukenera icyuho gikabije ni bitatu. Ubwa mbere, iremeza ingendo zitabujijwe kumurongo wa electron. Imbere ya molekile nyinshi ya gaze, electron ziratatana zikagongana, zigatakaza ingufu kandi zikananirwa kugeza ubushyuhe bwibanze ku ntego. Igiti cyaba defocus, bigatuma inzira idakora.
Icya kabiri, kandi cyane cyane, ibidukikije byangiza byemeza ubwiza nubwiza bwa firime yabitswe. Bitabaye ibyo, imyuka isigaye nka ogisijeni hamwe n’umwuka w’amazi byanduza igifuniko mu buryo bubiri bubi: bashoboraga gufata imiti hamwe n’ibicanwa biva mu mwuka kugira ngo babe oxyde idakenewe, hanyuma binjizwe muri firime ikura nk’umwanda. Ibi bivamo firime yuzuye, idafatanye, kandi ifite imiterere ya mehaniki na optique. Icyuho kinini kirema inzira isukuye, "ballistique" kuri atome ziva mu kirere, zibemerera guhurira mu cyerekezo cyinshi, kimwe, kandi cyuzuye.
Hanyuma, icyuho kirinda imbunda ya electron. Cathode ya thermionic isohora electron ikora mubushyuhe bwinshi cyane kandi ishobora okiside kandi igashya hafi ako kanya iyo ihuye numwuka.
Kubwibyo, sisitemu ihambaye yo kuvoma-ikomatanya pompe zikaze hamwe na pompe-vacuum nyinshi nka pompe ya turbomolecular cyangwa ikwirakwizwa-ni ngombwa. Mu gusoza, pompe ya vacuum ntabwo ituma gusa amashanyarazi ya elegitoronike; irabisobanura, ikora umurunga utavunika ningirakamaro mugukora ibicuruzwa byiza cyane bisabwa ninganda kuva semiconductor kugeza optique. Hagomba kandi kubahomuyunguruzikurinda pompe vacuum, niba ntahari,twandikire.
Igihe cyo kohereza: Ugushyingo-12-2025
