Kwihlabathi elintsonkothileyo lokubekwa kwefilimu ebhityileyo, umqadi we-electron (e-beam) uphuphuma ngumphunga ugqama ngokukwazi kwawo ukudala ubunyulu obuphezulu, iingubo ezixineneyo. Umbuzo osisiseko ojikeleze le teknoloji kukuba ingaba ifuna impompo yokucoca. Impendulo nguewe ocacileyo. Inkqubo yokucoca esebenza kakhulu ayiyonto nje yokuncedisa kodwa iyimfuneko egqibeleleyo ukuze inkqubo isebenze ngokufanelekileyo nangempumelelo.
Undoqo we-e-beam evaporation ibandakanya ukujolisa umqadi we-electron one-eneji ephezulu kwizinto zomthombo (ezifana negolide, isilicon oxide, okanye i-aluminiyam) equlethwe kwi-crucible epholiswe ngamanzi. Ukufudumeza okunzulu kwendawo kubangela ukuba izinto zinyibilike kwaye zibe ngumphunga. Ezi athom zomphunga zihamba ngendlela yomgca wokubona kwaye zijike kwi-substrate, zenze ifilimu encinci. Olu landelelwano lulonke luxhomekeke ngokubalulekileyo kwindawo yevacuum ephezulu, ngokuqhelekileyo ngaphakathi koluhlu lwe-10⁻³ Pa ukuya kwi-10⁻⁶ Pa.
Imfuneko yevacuum enjalo iphindwe kathathu. Okokuqala, iqinisekisa ukuhamba okungahambiyo kwe-electron beam. Xa kukho iimolekyuli zegesi ezininzi kakhulu, ii-electron ziya kusasazeka kwaye zingqubane, ziphulukane namandla azo kwaye zisilele ukuhambisa ubushushu obuqinileyo kwindawo ekujoliswe kuyo. Umqadi ubunokungagxininisi, nto leyo eyenza ukuba inkqubo ingasebenzi.
Okwesibini, kwaye kubaluleke kakhulu, indawo ye-vacuum iqinisekisa ukucoceka kunye nomgangatho wefilimu egciniweyo. Ngaphandle kwayo, iigesi ezishiyekileyo ezifana neoksijini kunye nomphunga wamanzi ziya kungcolisa i-coating ngeendlela ezimbini ezitshabalalisayo: ziya kusabela ngokwekhemikhali ngezinto ezinomphunga ukuze zenze ii-oxides ezingafunekiyo, kwaye ziya kufakwa kwifilimu ekhulayo njengobumdaka. Oku kubangela ifilimu enemingxuma, engancamathelisi kangako, kwaye ineempawu ezikumgangatho ophantsi womatshini kunye ne-optical properties. I-vacuum ephezulu idala indlela ecocekileyo, "ye-ballistic" yee-athom ezinomphunga, ezivumela ukuba zidibanise zibe ngumaleko oshinyeneyo, olinganayo kunye nomgangatho ophezulu.
Ekugqibeleni, i-vacuum ikhusela i-filament ye-electron gun. I-cathode ye-thermionic ekhupha ii-electron isebenza kumaqondo obushushu aphezulu kakhulu kwaye iya kukhupha i-oxidize kwaye itshise ngokukhawuleza ukuba ibonakaliswe emoyeni.
Ke ngoko, inkqubo yokumpompa entsonkothileyo-edibanisa iimpompo ezirhabaxa kunye neempompo zevacuum eziphezulu ezifana ne-turbomolecular okanye iimpompo zokusasaza-iyimfuneko. Ukuqukumbela, impompo yokufunxa ayivumeli nje ukuphuphuma komqadi we-electron; iyayichaza, yenza ibhondi engenakunqanyulwa ebalulekileyo ekuveliseni iingubo eziphezulu zokusebenza ezifunwa ngamashishini ukusuka kwi-semiconductors ukuya kwi-optics. Kufuneka kubekho kwakhonaizihluziukukhusela iimpompo ze-vacuum, ukuba akukho,Qhagamshelana nathi.
Ixesha lokuposa: Nov-12-2025
