Ingubo yokufuma, inkqubo ye-core physical vapor deposition (PVD), ngokusisiseko ixhomekeke kubuchwepheshe be-vacuum. I-vacuum pump ayisiyonto incedisayo nje kuphela kodwa lilitye lembombo elivumela yonke inkqubo ngokudala nokugcina imeko-bume elawulwa kakhulu ye-molecular-scale. Umsebenzi wayo udlulela ngaphaya kokususa umoya ngokulula, umisela iimeko zomzimba ezichanekileyo ezifunekayo ukuze kufakwe iifilimu ezincinci ezisebenzayo ezisemgangathweni ophezulu.
Isizathu esiphambili sokufuna i-vacuum ephezulu kukuqinisekisa ukuhamba ngokuthe ngqo kwee-particles eziphumayo. Xa uxinzelelo lomoya luphezulu, uxinano olukhulu lwee-molecules zegesi lubangela ukungqubana kwangoko nangokungacwangciswanga, nto leyo esasaza izinto zokugquma. Phantsi kwe-vacuum ephezulu (ngesiqhelo ukusuka kwi-10⁻⁴ ukuya kwi-10⁻⁶ mbar), indlela ephakathi ekhululekileyo yee-athomu okanye ii-molecule eziphumayo iyanda kakhulu ukuya kwiimitha ezininzi, nto leyo evumela ukuba zihambe ngokuthe ngqo ukusuka kumthombo ukuya kwi-substrate. Oku kwenza kube lula ukulawula ngokuchanekileyo ubukhulu befilimu, ukufana, kunye nokwakheka kwayo.
Ngaphezu koko, indawo ene-vacuum ephezulu ithintela i-oxidation kunye nongcoliseko. Uninzi lweentsimbi (umz., i-aluminium, i-chromium) kunye neekhompawundi zisabela kakhulu kumaqondo obushushu bokufuma. Ukususwa kweegesi ezisabelayo ezifana neoksijini kunye nomphunga wamanzi kuqinisekisa ukuba izinto zibekwe kwimeko yazo ecocekileyo, yesinyithi, nto leyo ebalulekileyo ekufezekiseni iipropati ezithile ze-optical, zombane, okanye ze-mechanical kwi-coating yokugqibela. Le ndawo ikwabonelela ngomphezulu we-substrate ococekileyo ngokwe-atom ngokususa ungcoliseko, nto leyo ebalulekileyo ekunamatheleni kwefilimu ngokuqinileyo.
Inkqubo yepompo yokufunxa umoya isebenza njengenjineli yokusingqongileyo. Kufuneka ikhawulezise ukuseka uxinzelelo olufunekayo, igcine uzinzo ngokususa igesi ephumayo kwizinto kunye nezixhobo, kwaye iphathe iimveliso eziphumayo kwiinkqubo ezisebenzayo. Olu zinzo lubalulekile kumgangatho wemveliso ohambelanayo.
Imfuneko ebalulekileyo yokuhluza ivela ekukhuseleni le nkqubo ichanekileyo. Inkqubo yokugquma ngokwayo inokuvelisa izinto ezincinci, amathontsi atshiziweyo, okanye umphunga ovuthuzayo.isihluzi sokungena, ezi zinto zingcolisayo zinokutsalwa zibuyele kwipompo ye-vacuum. Oku kukhokelela ekugugulekeni okukhulu kwee-rotors kunye neeblades, ungcoliseko lweoyile yepompo (kwiinkqubo ezivalwe ngeoyile), kunye nokuwohloka kancinci kancinci kwesantya sokumpompa kunye ne-vacuum yokugqibela. Ekugqibeleni, oku kuphazamisa uzinzo lwenkqubo, kunciphisa ubomi benkonzo yepompo, kwaye kwandisa iindleko zokulungisa. Ke ngoko, ukufaka izihluzi ezifanelekileyo—ezifana nezihluzi ze-particle, ii-molecular traps, okanye ii-cold traps—akunyanzelekanga kodwa lutyalo-mali olubalulekileyo lokukhusela ipompo ye-vacuum, ukuqinisekisa umgangatho ohambelanayo wokugquma, kunye nokukhusela ixesha lokusebenza kwemveliso.
Lilonke, iimpompo ze-vacuum zivumela ukugqunywa komphunga ngokubonelela ngendawo ecocekileyo, engangcoliswanga, nelawulwayo yokuthuthwa kwezinto kunye nokwenziwa kwefilimu. Ukudibanisa olu buchule nesicwangciso sokucoca esiqinileyo kubalulekile ekufezekiseni imveliso yefilimu encinci ethembekileyo, esebenza kakuhle, nengabizi kakhulu.
Ixesha leposi: Disemba-25-2025
