ISIHLUNGI SE-LVGE VACUUM PUMP

"I-LVGE Ixazulula Izinkathazo Zakho Zokuhlunga"

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kubakhiqizi bephampu yevacuum abakhulu abangama-26 emhlabeni jikelele

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I-Electron Beam Evaporation kanye ne-Vacuum Pump

Ezweni eliyinkimbinkimbi lokumiswa kwefilimu emincane, ukuhwamuka kwe-electron beam (e-beam) kugqama ngekhono lakhona lokudala ukuhlanzeka okuphezulu, okuminyene. Umbuzo obalulekile ozungeze lobu buchwepheshe ukuthi ingabe idinga ipompo ye-vacuum. Impendulo inguyebo ongenakuphikiswa. Isistimu ye-vacuum esebenza kahle kakhulu ayiyona nje into esetshenziswayo kodwa iyisidingo esiphelele ukuze inqubo isebenze ngempumelelo nangempumelelo.

Umnyombo wokuhwamuka kwe-e-beam uhlanganisa ukugxilisa insimbi ye-electron yamandla aphezulu kumthombo wezinto (njengegolide, i-silicon oxide, noma i-aluminium) equkethwe ku-crucible epholiswe ngamanzi. Ukushisisa kwasendaweni okunamandla kubangela ukuthi impahla incibilike futhi ihwamuke. Lawa ma-athomu ahwamukile abe esehamba ngendlela yomugqa wokubona futhi ajiyane endaweni engaphansi, enze ifilimu elincanyana. Konke lokhu kulandelana kuncike kakhulu endaweni enevacuum ephezulu, ngokuvamile phakathi kwebanga lika-10⁻³ Pa ukuya ku-10⁻⁶ Pa.

I-Electron Beam Evaporation

Isidingo se-vacuum enjalo eyeqisayo siphindwe kathathu. Okokuqala, iqinisekisa ukuhamba okungavinjelwe kwe-electron beam. Uma kukhona ama- molecule egesi amaningi kakhulu, ama- electron ayeyohlakazeka futhi ashayisane, alahlekelwe amandla awo futhi ehluleke ukuletha ukushisa okugxilile kulokho okuhlosiwe. I-beam yayizoyeka ukugxila, yenze inqubo ingasebenzi.

Okwesibili, futhi okubaluleke kakhulu, indawo ye-vacuum iqinisekisa ubumsulwa kanye nekhwalithi yefilimu efakiwe. Ngaphandle kwawo, amagesi ayinsalela afana nomoya-mpilo kanye nomhwamuko wamanzi angangcolisa uqweqwe ngezindlela ezimbili ezibhubhisayo: ayezosabela ngokwekhemikhali ngento ehwamukile enze ama-oxide angafuneki, futhi ayezohlanganiswa nefilimu ekhulayo njengokungcola. Lokhu kubangela ifilimu enezimbotshana, enganamatheli kakhulu, futhi enezakhiwo ezisezingeni eliphansi zemishini nezamehlo. I-vacuum ephezulu idala indlela ehlanzekile, "ye-ballistic" yama-athomu ahwamukile, ewavumela ukuthi aminyene abe ungqimba oluminyene, olufana noluphezulu.

Ekugcineni, i-vacuum ivikela umcu wesibhamu se-electron. I-thermionic cathode ekhipha ama-electron isebenza emazingeni okushisa aphezulu kakhulu futhi ingakhipha i-oxidize futhi ishise cishe ngaso leso sikhathi uma ichayeke emoyeni.

Ngakho-ke, uhlelo lokumpompa oluyinkimbinkimbi—okuhlanganisa amaphampu aqinile namaphampu anevacuum ephezulu njengamaphampu e-turbomolecular noma amaphampu okusabalalisa—kubalulekile. Sengiphetha, iphampu ye-vacuum ayinikezi amandla nje ukuhwamuka kwe-electron beam; iyakuchaza, ukwakha isibopho esinganqamuki esibalulekile ekukhiqizeni ama-coatings asezingeni eliphezulu afunwa yizimboni kusuka kuma-semiconductors kuya ku-optics. Kufanele futhiizihlungiukuvikela amaphampu e-vacuum, uma engekho,Xhumana nathi.


Isikhathi sokuthumela: Nov-12-2025