Munyika yakaomesesa yekuiswa kwefirimu rakatetepa, danda reelectron (e-beam) kubuda kwemhepo kunobuda pachena nekugona kwaro kugadzira mabhachi akanyanya kuchena, akakora. Mubvunzo wakakosha wakatenderedza tekinoroji iyi ndewekuti inoda vacuum pombi. Mhinduro ndihongu asina mubvunzo. Iyo yepamusoro-inoshanda vacuum sisitimu haingori chishongedzo asi chinodiwa chakakwana kuti maitiro ashande nemazvo uye nemazvo.
Mwoyo we e-beam evaporation unosanganisira kutarisisa danda reerekitironi rine simba guru pane chinhu chinobva (segoridhe, silicon oxide, kana aluminium) iri mumucheka wakanyoroveswa nemvura. Kupisa kwakanyanya kwenzvimbo kunoita kuti zvinhu zvinyunguduke uye zvinyunguduke. Aya maatomu akapfava anobva afamba munzira-ye-yekuona uye anonamira pane imwe substrate, achigadzira firimu rakatetepa. Kutevedzana kwese uku kunotsamira zvakanyanya pane yakakwira-vacuum nharaunda, kazhinji mukati mechikamu che10⁻³ Pa kusvika 10⁻⁶ Pa.
Izvo zvinodikanwa zvekuvharisa zvakanyanya zvakadaro zvakapetwa katatu. Kutanga, inova nechokwadi chekufamba kusingabviri kweyerekitironi danda. Kana paine mamorekuru egasi akawandisa, maerekitironi aizopararira obonderana, achirasikirwa nesimba rawo uye achitadza kuendesa kupisa kwakanyanya kune chinangwa. Danda racho raizodzima, zvichiita kuti basa racho risashande.
Chechipiri, uye zvakanyanya kukosha, iyo vacuum nharaunda inovimbisa kuchena uye kunaka kwefirimu rakaiswa. Pasina iyo, magasi akasara akaita seokisijeni nemhute yemvura aizosvibisa coating nenzira mbiri dzinoparadza: aizoita kemikari nezvinhu zvakapfava kuti agadzire maokisidhi asingadiwi, uye aizobatanidzwa mufirimu iri kukura setsvina. Izvi zvinoguma nefirimu rine porous, risinganamire zvishoma, uye rine yakaderera mechanical uye optical zvinhu. Iyo yakakwira vacuum inogadzira nzira yakachena, ye "ballistic" yemaatomu akafukidzwa, ichiabvumira kudzika kuita dense, yunifomu, uye yakakwirira-kutendeseka layer.
Pakupedzisira, vacuum inodzivirira filament ye electron gun. Iyo thermionic cathode iyo inoburitsa maerekitironi inoshanda patembiricha yakanyanya uye inopisa uye inopisa kanenge pakarepo kana yakasangana nemhepo.
Naizvozvo, yakaomesesa yekupomba sisitimu — inosanganisa roughing pombi uye yakakwirira-vacuum pombi senge turbomolecular kana diffusion pombi-inokosha. Mukupedzisa, pombi yevacuum haingogonese erekitironi danda kubuda; inoitsanangura, ichigadzira chisungo chisingaputsiki chakakosha pakugadzira machira epamusoro anodiwa nemaindasitiri kubva kune semiconductors kusvika kune optics. Panofanirawo kuvapofilterskuchengetedza vacuum pombi, kana pasina,taura nesu.
Nguva yekutumira: Nov-12-2025
