How much do you know about the booming emerging high-tech industry - the semiconductor industry? The semiconductor industry belongs to the electronic information industry and is an important component of the hardware industry. It mainly produces and manufactures semiconductor devices, including integrated circuits, diodes and transistors, etc. The production process of semiconductors also utilizes vacuum technology, thus, vacuum pumps and filters are also needed.
The vacuum environment can greatly prevent impurities and particles in the air from polluting the workpiece, which is crucial for the quality of chips and other electronic components. However, these particles may be sucked into the vacuum pump, and then damaging it. This not only damages the equipment, but also affects product quality. Therefore, it is necessary to install a vacuum pump filter(inlet filter) to protect the vacuum pump.
We need to select the appropriate filter specifications based on the size of the particles. It means filtering fineness. In addition, in semiconductor manufacturing processes, various gases are used for different purposes such as etching and deposition. These gases may be corrosive, so it is also essential to choose corrosion-resistant filter medium. If the gas is not highly corrosive and the particles are relatively small, polyester fiber can be considered. If it is highly corrosive,filter elements made of stainless steel 304 or even stainless steel 316 can be considered, but their fineness are relatively low.
The above picture shows the intake filter that we provide for the dry screw vacuum pump of a semiconductor manufacturer. LVGE has gradually gained fame in China. We have cooperated with 26 vacuum pump manufacturers worldwide like ULVAC JANPAN, and served for many companies of the fortune 500,such as BYD. We are also in contact with more and more industries, but always serving the vacuum field, especially the vacuum pump filtration.
Post time: Apr-15-2024